{"id":2,"date":"2023-08-24T08:49:40","date_gmt":"2023-08-24T08:49:40","guid":{"rendered":"http:\/\/npcl.com.tw\/?page_id=2"},"modified":"2023-09-08T05:59:22","modified_gmt":"2023-09-08T05:59:22","slug":"%e6%8a%80%e8%a1%93%e6%94%af%e6%8f%b4","status":"publish","type":"page","link":"https:\/\/npcl.com.tw\/?page_id=2","title":{"rendered":"\u6280\u8853\u652f\u63f4"},"content":{"rendered":"\n

UV LASER \u7d2b\u5916\u5149\u96f7\u5c04<\/mark><\/strong><\/h2>\n\n\n\n
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\"\"<\/figure>\n\n\n\n

\u96f7\u5c04\u805a\u7126\u9ede\u5927\u5c0f Spot Size=(4\u03bb<\/strong>f\/\u03c0D) \u2026\u2026\u2026(\u7406\u8ad6\u503c)
 
\u4f46\u56e0\u70ba\u884d\u5c04(diffraction)\u7684\u95dc\u4fc2\u53ea\u6709\u5b8c\u7f8e\u7684\u5149\u675f\u54c1\u8cea\u624d\u80fd\u5c07\u805a\u7126\u9ede\u7e2e\u5c0f\u81f3\u7406\u8ad6\u7684\u6975\u9650\u503c\uff0c\u4e00\u822c\u800c\u8a00\u7e2e\u5c0f\u96f7\u5c04\u805a\u7126\u9ede\u9700\u8981\u77ed\u6ce2\u9577\u8207\u5927\u6578\u503c\u5b54\u5f91 (numerical aperture= n *sin\u03b8~D\/2f)\uff1b\u7d2b\u5916\u5149\u6ce2\u9577\u77ed(\u03bb<400nm)\uff0c \u6240\u4ee5\u805a\u7126\u9ede\u8f03\u7d05\u5916\u5149\u53ca\u53ef\u898b\u5149\u96f7\u5c04\u5c0f\uff0c\u6240\u4ee5\u7d2b\u5916\u5149\u96f7\u5c04\u52a0\u5de5\u6642\u6709\u8f03\u4f73\u7684\u7a7a\u9593\u89e3\u6790\u5ea6(spatial resolution) \u3002
 
\u7d2b\u5916\u5149\u96f7\u5c04\u70ba\u51b7\u52a0\u5de5\u3002 \u901a\u5e38\u7d05\u5916\u5149\u53ca\u53ef\u898b\u5149\u96f7\u5c04\u4fc2\u5229\u7528\u5176\u80fd\u91cf\u5bc6\u5ea6\u5728\u7126\u9ede\u4e0a\u805a\u71b1\u4f7f\u5de5\u4ef6\u878d\u5316\u3001\u84b8\u767c\uff0c\u9032\u800c\u5c07\u6750\u6599\u5f9e\u5de5\u4ef6\u4e0a\u79fb\u9664\uff0c\u6b64\u4e00\u6a5f\u5236\u6703\u56e0\u9ad8\u6eab\u7684\u5f71\u97ff\u5728\u52a0\u5de5\u5340\u5468\u570d\u9020\u6210\u71d2\u7126\u3001\u88c2\u7d0b\u8207\u8ff4\u878d\u7b49\u526f\u4f5c\u7528\uff0c\u5373\u6240\u8b02\u71b1\u6548\u61c9\u5340(heat-affected zone\uff0c HAZ)\u3002\u7d2b\u5916\u5149\u96f7\u5c04\u56e0\u70ba\u6ce2\u9577\u77ed\u3001\u96fb\u5b50\u4f0f\u7279\u9ad8\uff0c\u5c0d\u8a31\u591a\u9ad8\u5206\u5b50\u6750\u6599(PI\u3001Mylar\u3001Kapton\u3001\u8edf\u677f\u7b49)\u53ef\u4ee5\u76f4\u63a5\u7834\u58de\u5176\u5206\u5b50\u9375\u7d50\uff0c\u6b64\u4e00\u6a5f\u5236\u7a31\u70ba\u96f7\u5c04\u525d\u96e2(laser ablation)\uff0c\u5176\u71b1\u6548\u61c9\u5c0f\uff0c\u6240\u4ee5\u53ef\u52a0\u5de5\u51fa\u66f4\u7d30\u5fae\u3001\u92b3\u5229\u7d50\u69cb\u3002\u56e0\u6b64\u7d2b\u5916\u5149\u96f7\u5c04\u8f03\u5176\u4ed6\u96f7\u5c04\u66f4\u9069\u5408\u65bc\u5fae\u7d30\u7684\u96f7\u5c04\u947d\u5b54\u8207\u96f7\u5c04\u5207\u5272\u88fd\u7a0b\u3002<\/p>\n<\/div>\n\n\n\n

<\/div>\n\n\n\n

Taper Angle Control \u9310\u5ea6\u63a7\u5236<\/strong><\/mark><\/strong><\/h2>\n\n\n\n
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\"\"<\/figure>\n\n\n\n

Taper Angle \u03b1 = tan-1(d1-d2\/2t)
d1 :\u5165\u53e3\u5b54\u5f91 ; d2 :\u51fa\u53e3\u5b54\u5f91 \uff1bt :\u5de5\u4ef6\u539a\u5ea6<\/p>\n\n\n\n

\u50b3\u7d71\u96f7\u5c04\u52a0\u5de5\u53d7\u906e\u9589\u6548\u61c9\u7684\u5f71\u97ff\uff0c\u9020\u6210\u96f7\u5c04\u947d\u5b54\u7684\u5b54\u5f91\u6f38\u7e2e(d1> d2 )\u6216\u96f7\u5c04\u5207\u5272\u6e9d\u69fd\u7684\u58c1\u9762\u5448\u659c\u9762\uff0c\u5176\u7d50\u679c\u56b4\u91cd\u5f71\u97ff\u52a0\u5de5\u7cbe\u5ea6\u8207\u6df1\u5bec\u6bd4\u3002\u4e14\u591a\u9918\u7684\u96f7\u5c04\u80fd\u91cf\u7a4d\u805a\u5728\u5165\u53e3\u8655\uff0c\u82e5\u52a0\u5de5\u7684\u6750\u6599\u662f\u9676\u74f7\u3001\u73bb\u7483\u3001\u77fd\u6676\u7247\u7b49\uff0c\u5247\u5bb9\u6613\u9020\u6210\u5165\u53e3\u8868\u9762\u7834\u88c2\u6216\u88c2\u7d0b\u7522\u751f\uff0c\u9019\u662f\u7d55\u5927\u591a\u6578\u96f7\u5c04\u52a0\u5de5\u96e3\u4ee5\u907f\u514d\u7684\u7f3a\u9ede\u3002<\/p>\n\n\n\n

\u5fae\u65b0\u7cbe\u5bc6\u85c9\u7531\u6e96\u78ba\u7684\u64cd\u7e31\u5149\u5b78\u8ef8\u7dda\uff0c\u6539\u8b8a\u52a0\u5de5\u58c1\u9762\u7684\u659c\u7387\uff0c\u4e0d\u4f46\u53ef\u4ee5\u7522\u751f\u201d\u96f6\u9310\u5ea6\u201d (d1=d2)\u7684\u58c1\u9762\uff0c\u751a\u81f3\u662f\u201d\u9006\u9310\u5ea6\u201d(d1<d2 )\u7684\u5b54\u58c1\u3002<\/p>\n\n\n\n

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\"\"<\/figure>\n<\/figure>\n\n\n\n

\u6b64\u4e00\u65b9\u5f0f\u6d88\u9664\u50b3\u7d71\u96f7\u5c04\u52a0\u5de5\u7684\u7f3a\u5931\uff0c\u63d0\u9ad8\u52a0\u5de5\u6df1\u5bec\u6bd4\uff0c\u53ef\u61c9\u7528\u65bc\u9700\u8981\u5782\u76f4\u58c1\u9762\u7684\u63a2\u91dd\u5361\u5c0e\u5b54\u677f(Probe Card Guide Plate)\u3001\u9ad8\u6df1\u5bec\u6bd4\u5fae\u6d41\u9053( high aspect ratio micro-channel )\u53ca\u5177\u6536\u7e2e\/\u64f4\u5f35\u7684\u5fae\u5674\u5634(Convergent \/ Divergent Nozzle)\u7684\u61c9\u7528\u3002<\/p>\n<\/div>\n\n\n\n

\"\"<\/figure>\n\n\n\n
\"\"<\/figure>\n\n\n\n
<\/div>\n\n\n\n

Beam Shape Modulation \u5149\u578b\u8b8a\u5316<\/mark><\/strong><\/h2>\n\n\n\n
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\"\"<\/figure>\n<\/figure>\n\n\n\n

\u50b3\u7d71\u56fa\u614b\u96f7\u5c04\u5149\u675f\u80fd\u91cf\u70ba\u8fd1\u4f3c\u9ad8\u65af\u5206\u4f48\uff0c\u5728\u52a0\u5de5\u4e0a\u56e0\u4e2d\u9593\u80fd\u91cf\u9ad8\u53ef\u4ee5\u8f15\u6613\u8d85\u8d8aDamage threshold \u9054\u5230\u52a0\u5de5\u7684\u76ee\u5730\uff0c\u7136\u800c\u5728 Damage threshold \u4ee5\u5916\u591a\u9918\u7684\u80fd\u91cf\u537b\u5f62\u6210\u71b1\u6548\u61c9\u7834\u58de\u52a0\u5de5\u5340\u7684\u908a\u7de3\uff0c\u5f71\u97ff\u7522\u54c1\u7cbe\u5ea6\u8207\u8868\u9762\u54c1\u8cea\u3002

\u5fae\u65b0\u7cbe\u5bc6\u5229\u7528\u5149\u5b78\u5143\u4ef6\u5c07\u5149\u675f\u7684\u80fd\u91cf\u7531\u9ad8\u65af\u5206\u4f48\u8f49\u5316\u6210\u5e73\u9802\u578b\u5206\u4f48(Flat-Top) \uff0c\u7531\u65bc\u5468\u570d\u80fd\u91cf\u5206\u4f48\u9661\u5ced\uff0c\u6240\u4ee5\u6709\u6548\u6e1b\u5c11\u591a\u9918\u7684\u80fd\u91cf\uff0c\u964d\u4f4e\u71b1\u6548\u61c9\u7834\u58de\u3002<\/p>\n\n\n\n

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\"\"<\/figure>\n<\/figure>\n\n\n\n

\u6b64\u5916\u5fae\u65b0\u7cbe\u5bc6\u5c07\u5e73\u9802\u578b\u5206\u4f48\u7684\u96f7\u5c04\u5149\u675f\u642d\u914d\u6295\u5f71\u7cfb\u7d71\uff0c\u5f9e\u9ede\u52a0\u5de5\u8f49\u8b8a\u6210\u9762\u52a0\u5de5\uff0c\u5c07\u8907\u96dc\u7684\u52a0\u5de5\u5f62\u72c0\u5728\u5de5\u4ef6\u4e0a\u76f4\u63a5\u6210\u578b\uff0c\u6368\u68c4\u55ae\u9ede\u523b\u5283\u8017\u6642\u3001\u7c97\u7cd9\u7684\u7f3a\u9ede\u3002\u7279\u5225\u9069\u5408\u5728\u5851\u81a0\u8584\u819c\u96f7\u5c04\u947d\u5b54\u6216ITO\u8584\u819c\u96f7\u5c04\u8755\u523b(Laser Patterning)\u3002\u6b64\u5916\u914d\u5408\u5149\u7f69\u6539\u8b8a\u96f7\u5c04\u5149\u675f\u7684\u622a\u9762\u5f62\u72c0\uff0c\u53ef\u4ee5\u62d6\u62c9\u51fa\u5177\u5e7e\u4f55\u5f62\u72c0\u7684\u6e9d\u69fd\u3002<\/p>\n\n\n\n

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\"\"<\/figure>\n<\/figure>\n<\/div>\n\n\n\n
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\"\"<\/figure>\n<\/figure>\n<\/div>\n<\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"

UV LASER \u7d2b\u5916\u5149\u96f7\u5c04 \u96f7\u5c04\u805a\u7126\u9ede\u5927\u5c0f Spot Size=(4\u03bbf\/\u03c0D) \u2026\u2026\u2026(\u7406\u8ad6\u503c)&nbsp […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_themeisle_gutenberg_block_has_review":false,"footnotes":""},"class_list":["post-2","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/npcl.com.tw\/index.php?rest_route=\/wp\/v2\/pages\/2"}],"collection":[{"href":"https:\/\/npcl.com.tw\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/npcl.com.tw\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/npcl.com.tw\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/npcl.com.tw\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=2"}],"version-history":[{"count":17,"href":"https:\/\/npcl.com.tw\/index.php?rest_route=\/wp\/v2\/pages\/2\/revisions"}],"predecessor-version":[{"id":263,"href":"https:\/\/npcl.com.tw\/index.php?rest_route=\/wp\/v2\/pages\/2\/revisions\/263"}],"wp:attachment":[{"href":"https:\/\/npcl.com.tw\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=2"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}